Nanoscale Tribometer
ASML, Yale
2025
Designed, built, and tested a nanometer precision wear tester, or tribometer, for our client, ASML.
Designing, engineering, and manufacturing for precise flat on flat contact while minimizing vibration noise was the largest goal in this project. Successful system readings were able to be captured with 40 nm accuracy. Due to in-house manufacturing precision constraints, full wear tests were able to be captured with 10 μm accuracy.
Custom component manufacturing was primarily done by lathe, mill, and CNC in the machine shop. System integration, programming, and data collection was done with a custom created LabVIEW VI.
Partners: Jonah Heiser, Dylan Sevenikar, Wade Wahlig